Aera
FC-PIR98X Pressure Insensitive MFC
Mass Flow Controller
FCPIR980C4VX9THA
MGMR Part# 797-160426-001
Range: 1000 SCCM
UFS: 500 SCCM
BIN: MULTI-06
FW: 3.21
Gas: SIH4(0.606), Cal Gas: N2, Semi Gas: 39, CF: 0.606
N2 Flows:
100%: 1000.118 SCCM
50%: 500.040 SCCM
30%: 299.978 SCCM
10%: 99.938 SCCM
The Aera FC-PIR98x Pressure Insensitive MFC 1000 SCCM FCPIR980C4VX9THA is a mass flow controller with a maximum flow rate of 1000 SCCM (1 SLM).
The Aera FC-PIR98x is a pressure-insensitive mass flow controller (MFC) that combines thermal flow architecture with a pressure and temperature sensor, and NeuralStep control technology. This design creates a compact delivery package that eliminates the need for some costly gas panel components
Have some marks and scratches due to old stock.
Power on and tested item tested picture are attached.
© All the pictures are Organic and this part is physically in our stock