TEL Tokyo ElectronModel: 2184-020931-12TTLM02-11 MDIF5B PCB1108-001011-1 MDIF Sys Spare Part for data input and output related to the Mass Density Interface Flow (MDIF) system, which controls gas flow and pressure within the furnace chamber.Have some marks and scratches due to old stock.© All the pictures are Organic and this part is physically in our stock